DMo-WA series

Designed for wafer and disc-shaped samples

Application Notes

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Citations

Our contact angle meters for wafer applications are recognized as benchmark tools in numerous scientific and research fields,
a testament to their frequent citation in scholarly publications.
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Different Degrees of Automation

The following overview highlights the differences in measurement processes across the DMo-WA series models.

Step 1

First positioning

Step 2

Droplet generation

Step 3

Droplet deposition

Step 4

Droplet analysis

Step 5

Next positioning

Step 6

Full-scale continuous

Model	First positioning	Droplet generation	Droplet deposition (control/recognition)	Droplet analysis	Next positioning	Full-scale continuous
DMo-902WA	Auto	Auto	Auto/Auto	Auto	Auto	Auto
DMo-702WA	Manual (Command button)	Auto	Auto/Auto	Auto	Auto	Manual
DMo-502WA	Manual (Rotary knob)	Auto	Manual/Auto	Auto	Manual	Manual

■ Main Features

Fast image-capture system with standard 400 fps at 640x480 resolution, USB 3.0 CMOS camera, max. 2700fps at 640x64 resolution
Automatic single dispenser system with a set of 5 glass syringes and 5 SUS needles for precise adjustment of droplet volume and quick refilling and replacement of liquid samples
Automatic recognition of drop deposition
Live image display and droplet volume monitoring
Diameter 335mm 360º rotation sample stage with a maximum load capacity of 0.4 kg
Fine adjustable stage travel for exact positioning, travel distance: x-axis: 150mm, y-axis: fixed, z-axis: fixed
Focusing aid with displayed index graph, value, and brightness adjustment to achieve perfect focus
Movie converter to convert data images to MPEG-1 or AVI movie format
Determination of contact angles, droplet volume, residual droplet volume, sessile drop volume, height, and radius of the sessile drop
Measured results are displayed in a spreadsheet for easy reference and comparison, and saved in CSV format for easy export to and manipulation in MS Excel
User-specified analysis report function, providing measurement results and parameters
Adjustable level of the body and stage
Droplet calibration standard for standard view, bearing one full circle for calibration, and three droplet silhouettes of 5º, 60º, and 108º for periodic inspection of measurement accuracy

■ Optional Hardware Accessories

Tilting stage for measurements of roll-off angles, incl. FAMAS software add-in [Sliding method] (except 902WA)
Add-on module [Dynamic sliding method] to measure roll-off speed and roll-off acceleration. Only in combination with the tilting stage package (except 902WA)
Multi-manual dispenser holder
Multi-automatic dispenser system
Large capacity pump dispenser, incl. a 50μl liquid container
Surface free energy kit
Pendant drop kit (for standard & wide view)
Captive-bubble measurement kit
Droplet calibration standard (for wide 1 view)
Pendant drop calibration standard (for standard view)
Pendant drop calibration standard (for wide 1 and wide 2 view)

■ Key Application Areas

Surface cleanliness and homogeneity after cleaning processes (typically for the removal of organic contaminations)
Surface properties such as wettability and adhesion of modified surfaces and thin film coatings
Wetting and dewetting properties in immersion lithography processes using the sliding method with an external tilting stage and/or using the extension/contraction method

	DMo-902WA	DMo-702WA	DMo-502WA
Camera system	USB3.0 CMOS camera with: 400fps at 640x480 pixels 500fps at 640x400 pixels 1000fps at 640x200 pixels 2700fps at 640x64 pixels
Optical system	focus: manual focus with 3-step manual zoom field of view: 6.1x4.7mm, 11.1x8.2mm, 15.8x11.8mm ±6%
Measuring methods	contact angle: sessile drop (static & dynamic), advancing/receding, tilting¹⁾ surface/interfacial tension: pendant drop (static & dynamic)
Analysis methods	contact angle: θ/2, tangent, curve fitting (ellipse, circle) surface/interfacial tension: Young-Laplace, ds/de surface free energy of solids: OWRK, Owens-Wendt, Kaelble-Uy, Kitazaki-Hata, Wu, acid-base, Zisman
Measuring range	contact angle: 0 to 180° surface/interfacial tension: 0 to 2000mN/m
Resolution	contact angle: 0.01° surface/interfacial tension: 0.01mN/m
Accuracy²⁾	contact angle: 0.2° surface/interfacial tension: 0.2mN/m
Maximum sample surface area and height (Dia.xH)	max. 300x35mm
Maximum sample weight	400g
Sample stage operation: X-axis Y-axis Z-axis Rotation axis	150mm (aut.) --- --- 360° (aut.)	150mm (aut.) --- --- 360° (man.)	150mm (man.) --- --- 360° (man.)
Dispenser operation: Z-axis Droplet deposition Droplet generation Dispensing resolution	35mm automatic automatic 0.1μl	35mm automatic automatic 0.1μl	35mm manual automatic 0.1μl
Measuring temperature	ambient
Dimensions (WxDxH) of: Main instrument Control box	375x684x432mm 290x240x100mm		375x684x432mm 260x200x70mm
Approximately weight of: Main instrument Control box	12.5kg 4.3kg	11.0kg 4.3kg	10.0kg 1.6kg
Electric power: Voltage Frequency Power consumption	AC100-240V 50/60 Hz 115W 120VA		AC100-240V 50/60 Hz 25W 48VA
Operating environment	temperature: +10 to +35℃, humidity: 30-80%RH (non-condensing) positioned away from sources of electrical noise and vibration

¹⁾ An optional external tilting stage is required
²⁾ Accuracy is the repeatability in terms of standard deviation based on the manufacturer’s calibration standard