DMo-WA series
The three models of the DMo-WA series are specially designed contact angle meters for measurements of disk-shaped substrates such as silicon wafers with a diameter of up to 300mm.
All models feature a 305mm diameter 360º rotation table and a computer-controlled dispenser which allow for automatic measurements of contact angle, advancing and receding angles, as well as analysis of surface free energy of solids.
Optional, a tilting stage for the measurement of roll-off angles is also available.
Each model combines the following features
- Fast image capturing system with standard 400 fps at 640x480 resolution USB3.0 CMOS camera, max. 2700fps at 640x64 resolution
- Automatic single dispenser system
- Diameter 335mm 360º rotation sample stage with a maximum load capacity of 0.4kgs
- Stage travel distance: x-axis: 150mm, y-axis: fixed, z-axis: fixed
- Focusing aid with displayed index graph and value and brightness adjustment to achieve perfect focus
- Movie converter to convert data images to MPEG-1 or AVI movie format
- Determination of contact angles, droplet volume, residual droplet volume, sessile drop volume, height, and radius of the sessile drop
- Measured results are displayed in a spreadsheet for easy reference and comparison, and saved in csv format for easy export to and manipulation in MS Excel
- User-specified analysis report function, providing measurement results and parameters
- Droplet calibration standard for standard view, bearing one full circle for calibration and three droplet silhouettes of 5º, 60º, and 108º for periodic inspection of measurement accuracy
The following table describes the differences between the measuring process of each model
DMo model |
Positioning of first measurement | Generation of droplet | Deposition of droplet (control / recognition) | Analysis of droplet | Positioning of next measurement | Full-scale continuous measurements |
502WA | ▲ by rotary knob |
● | ▲ / ● | ● | ▲ | ▲ |
702WA | ▲ by command button |
● | ● / ● | ● | ● | ▲ |
902WA | ● | ● | ● / ● | ● | ● | ● |
▲ manual ● automatic
Features
- Automatic recognition of drop deposition
- Live image display and droplet volume monitoring
- Movie converter
- Automatic dispenser with a set of 5 glass syringes and 5 SUS needles for precise adjustment of droplet volume and quick refilling and replacement of liquid samples
- Fine adjustable stage in x- and z-axis for exact positioning and gentle deposition of droplets without distortion
- Adjustable level of the body and stage
- Droplet calibration standard for standard view, bearing one full circle for calibration and three droplet silhouettes of 5º, 60º, and 108º for periodic inspection of measurement accuracy
Options
Hardware
- Tilting stage for measurements of roll-off angles, incl. FAMAS software add-in [Sliding method] (except 902)
- Add-on module [Dynamic sliding method] to measure roll-off speed and roll-off acceleration. Only in combination with the tilting stage package (except 902)
- Multi-manual dispenser holder
- Multi-automatic dispenser system
- Large capacity pump dispenser, incl. a 50μl liquid container
- Surface free energy kit
- Pendant drop kit (for standard & wide view)
- Droplet calibration standard (for wide 1 view)
- Pendant drop kit (for standard & wide view)
- Kit for captive-bubble-measurements
- Pendant drop calibration standard (for standard view)
- Pendant drop calibration standard (for wide 1 and wide 2 view)
Applications
- Surface cleanliness and homogeneity after cleaning processes (typically for removal of organic contaminations)
- Surface properties such as wettability and adhesion of modified surfaces and thin film coatings
- Wetting and dewetting properties in immersion lithography processes using the sliding method with external tilting stage and/or using the extension/contraction method
Specifications
DMo-902WA | DMo-702WA | DMo-502WA | |
Camera system |
USB3.0 CMOS camera with: 400fps at 640x480 pixels 500fps at 640x400 pixels 1000fps at 640x200 pixels 2700fps at 640x64 pixels |
||
Optical system |
focus: manual focus with 3-step manual zoom field of view: 6.1x4.7mm, 11.1x8.2mm, 15.8x11.8mm ±6% |
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Measuring methods |
contact angle: sessile drop (static & dynamic), advancing/receding, tilting1) surface/interfacial tension: pendant drop (static & dynamic) |
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Analysis methods |
contact angle: θ/2, tangent, curve fitting (ellipse, circle) surface/interfacial tension: Young-Laplace, ds/de surface free energy of solids: OWRK, Owens-Wendt, Kaelble-Uy, Kitazaki-Hata, Wu, acid-base, Zisman |
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Measuring range |
contact angle: 0 to 180° surface/interfacial tension: 0 to 2000mN/m |
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Resolution |
contact angle: 0.01° surface/interfacial tension: 0.01mN/m |
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Accuracy2) |
contact angle: 0.2° surface/interfacial tension: 0.2mN/m |
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Maximum sample surface area and height (Dia.xH) | max. 300x35mm |
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Maximum sample weight | 400g | ||
Sample stage operation: X-axis Y-axis Z-axis Rotation axis |
150mm (aut.) --- --- 360° (aut.) |
150mm (aut.) --- --- 360° (man.) |
150mm (man.) --- --- 360° (man.) |
Dispenser operation: Z-axis Droplet deposition Droplet generation Dispensing resolution |
35mm automatic automatic 0.1μl |
35mm automatic automatic 0.1μl |
35mm manual automatic 0.1μl |
Measuring temperature | ambient | ||
Dimensions (WxDxH) of: Main instrument Control box |
375x684x432mm 290x240x100mm |
375x684x432mm 260x200x70mm |
|
Approximately weight of: Main instrument Control box |
12.5kg 4.3kg |
11.0kg 4.3kg |
10.0kg 1.6kg |
Electric power: Voltage Frequency Power consumption |
AC100-240V 50/60 Hz 115W 120VA |
AC100-240V 50/60 Hz 25W 48VA |
|
Operating environment |
temperature: +10 to +35℃, humidity: 30-80%RH (non-condensing) positioned away from sources of electrical noise and vibration |
1) An optional external tilting stage is required
2) Accuracy is the repeatability in terms of standard deviation based on the manufacturer’s calibration standard